Variable temperature, four-wire sheet resistance measurements


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Sheet resistance measurements can be used in a wide variety of applications, including characterizing the electrical properties of new materials, monitoring the deposition process of thin films, and determining the uniformity of semiconducting thin films. Conventionally, such measurements are carried out at room temperature. However, many thin-film materials are utilized in extreme temperature environments.

In this app brief, we demonstrate a variable temperature sheet resistance measurement using a cryogenic probe station capable of operating at temperatures <4 K and as high as 675 K.